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Vaccum UVLamp |
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Vacuum UV (VUV)
lamps are deuterium lamps that are especially designed to supply deep UV
light down to a wavelength of 112 nm. The spectral range covers 110 nm
to 350 nm with especially high intensity between 120 nm and 160 nm. |
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They are used for |
- HPLC
- High resolution optics (e.g. quality
assurance)
- Semiconductor exposure
- Cleaning of silicon wafer surfaces
- Photo-chemical processes with high
photon energy
- And many other applications.
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It is specialized on high power VUV
lamps with up to 250 W. The D200 lamps come equipped
complete with a
cooling jacket for easy installation in water cooled operations.
Specially designed
power supplies are available for use with Heraeus VUV
lamps. | |
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